2-Dimensional Tip Characterization Grating 

Description

The TGG01 series of silicon calibration gratings is a 1-D array of triangular steps having precise linear and angular dimensions defined by the crystallography of Silicon (<111> plane) and maintained with high accuracy. The edges of the triangular steps have curvature radii less than 10nm.

Active area 3 x 3 mm Edge curvature radii less than 10 nm Pitch 3.0 µm ± 5nm Chip dimensions 5 x 5 x 0.45 mm Note: the dimension marked * is given for information only.

Application Notes

You can use TGG01 grating for 2-D tip characterization in contact mode, especially for cantilevers with high force constant. The triangular steps of TGG01 grating are much more robust than the spikes of TGT01.

The TGG01 calibration grating is also applicable for:

• lateral calibration of SPM scanners;
• detection of lateral and vertical scanner nonlinearity;
• detection of angular distortions.

For accurate quantification of images of TGG01 calibration grating, we recommend you to use Scanning Probe Image Processor (SPIP) designed by Image Metrology.

Fig.1 SEM image of TGG01 grating

Fig.2 20x20µm image of TGG01 grating

Calibration grating of the TGG01 series is also included in TGS02, TGS02C, and TGS03 sets.

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