Sets of calibration gratings

There are 3 sets of calibration gratings (TGS01, TGS02, and TGS03), which are grouped by applications. Z-calibration gratings are NIST-traceable in the TGS01C and TGS02C sets.

Grating Set

TGS01

TGS01C

TGS02

TGS02C

TGS03
TGX01 (lateral calibration)

I

I

I
TGT01 (tip characterization)

I

I

I
TGG01 (linear distortions)

I

I

I
TGZ01 (vertical calibration, 20 nm)

I

C

I

C
TGZ02 (vertical calibration, 100 nm)

I

C

I

C
TGZ03 (vertical calibration, 500 nm)

I

C

I

C

I : The calibration grating is included in the set.
C : The calibration grating is included in the set with individual MikroMasch calibration certificate, NIST-traceable.

 

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