To avoid distortions caused by lateral creep, use low scanning speed and repeat the scan after 1-2 minutes. However, distortions caused by vertical creep can be evaluated only on objects with steep slopes. Scan TGX01 grating to determine the magnitude of this effect for your microscope. Pay close attention to how the image is formed in the fast-scan and slow-scan directions, how the scanning direction affects the image distortion.

Fig.1a Image of TGX01. No distortion can be seen.

Fig.1b Image of TGX01. Creep is evident.

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